Dear Upender Prasad.
As you know steam sterilization technologies are based on three phases: air evacuation phase, sterilization phase, and drying phase. In analogue of ETO and gas-plasma sterilization technologies we should evacuate air to provide sterilant passing into all packaging materials, channels, all lumens and parts of MD. In ETO sterilizers we should remove air to 120 milibars to provide ETO passing in all parts of MD, in gas-plasma sterilizers we should have deeper vacuum because hydrogen peroxide have more heavy molecular mass and passing in long lumens of MD not so good like ETO. You can read about advantages and disadvantages of low temperature sterilization technologies in CDC Guidelines of Disinfection and sterilization in healthcare facilities.
Every time you should use sterilization technologies that approved of manufacturer of MD (ISO 17664).
Hope its help/
Petr Demidov, Moscow, Russia